Preparation of fluorine doped tin oxide by a spray. Fluorinedoped tin oxide thin films deposition by solgel. Optical constants such as refractive index n, extinction coefficient k and the absorption coefficient of the fto thin films were determined using spectrophotometric measurement of transmittance, absorbance and reflectance in the spectral range. Spray pyrolysis technique has been used to deposit fluorine doped tin oxide fto thin films. It can be used for lowe glasses, thin film solar cells, displays, etc. Despite its superior chemical stability and being composed of abundant elements, fto suffers from high surface roughness compared to ito. Mcelnea department of chemistry, the university of queensland, brisbane 4072, australia received 12 december 1994. Preliminary study in fabricating fluorinedoped tin oxide by using spray pyrolysis methods to cite this article. Fluorine doped tin oxide films from spray pyrolysis of.
Preparation and characterization of transparent conductive sno2. Undoped, fluorine doped and antimony doped tin oxide films are prepared on quartz plates by spray pyrolysis technique. Syntheses and characterization of fluorine doped tin oxide using spray pyrolysis technique. Thin films of undoped and fluorinedoped tin oxide have been prepared on fused silica substrates by a spray pyrolysis technique. Thin films of tin oxide sno 2 and fluorine doped tin oxide sno 2. The films grown at the optimum substrate temperature with different doping levels have been chosen for this study. F fto were prepared by sol gel dip coating sgdc route method by using easily available low cost materials as we use sncl 2, 2h 2o and hf. The inset in b is a schematic of the ultrasonic spray pyrolysis usp system. It was observed that the conductivity of the fto thin film increased with. Structural, optical and electrical properties were studied. Thin films of fluorinedoped sno 2 have been prepared by deposition on borosilicate glass using the spraypyrolysis technique. The solution was sprayed on the heated glass substrate using km 150 spray pyrolysis deposition machine.
The transparent conducting fto film gave low sheet resistance 8. Preparation of fluoridedoped tin oxide films on sodalime. Xray diffraction xrd spectrum showed all the peaks of the crystalline sno 2. The crystal structure of fto thin films was determined through xray diffraction xrd. Physical properties of highly oriented spray deposited. Fluorinedoped tin oxide fto thin films were deposited on glass substrates using ultrasonic spray pyrolysis usp at a fixed. Transparent conducting oxide tco is widely used for the application of flat panel display like liquid crystal displays and plasma display panel. Pdf fabrication of fluorine doped tin oxide fto thin. Electronic and optical properties of fluorinedoped tin. International journal of energy engineering 2012, 23. This works is fo cused on producing high transparency materials above.
Spray pyrolysis deposition spd technique has been employed to prepare large area fluorine doped tin oxide fto, nanocrystalline tio. Sno2 films have been prepared onto the amorphous glass substrates by a spray pyrolysis. Pdf fabrication of fluorine doped tin oxide fto thin filmsusing. Pdf pfluorine doped tin oxide fto thin films were deposited on glass substrates by home built spray pyrolysis setup at 400 5. During the deposition, the films were deposited at a constant temperature and. Synthesis and characterization of pure and fluorine doped. Fluorine doped tin oxide fto thin films were prepared by using ammonium fluoride nh4f and dbtda.
No postdeposition annealing treatments were carried out. Effect of fluorine doping on the electrical and optical. Paper open access related content preliminary study in. Preparation of fluorine doped tin oxide film by ultrasonic. The effect of substrate temperature on the optical properties of the films was also investigated. The fluorine concentration effect on structural, optical and electrical properties of sno2 films is investigated. The effect of substrate heating temperature upon spray pyrolysis. Optical characterization of fluorine doped tin oxide fto. Some physical properties of fluorinedoped sno 2 films. Fluorinedoped tin oxide films by spray pyrolysis using. Structural and electrical studies on highly conducting.
Pdf preparation of fluorine doped tin oxide film by. Transparent and conductive fluorine doped tin oxide thin films fto were deposited on to thoroughly cleaned glass substrates by nebulized spray pyrolysis technique using dihydrated tin ii chloride sncl 2. The fluorine concentration in the precursor solution was varied from 0 to 40 at. Fluorine doped tin oxide fto thin films were prepared by using amm onium fluoride nh 4f and dbtda.
Using the fto sol, fto films are prepared by ultrasonic spray pyrolysis technique. The effects of fluorine doping rate sno 2 films properties are studied. Fluorine doped tin oxide fto thin films were deposited on glass substrates by home built spray pyrolysis setup at 400 5. Among fdoped tin oxide films, the lowest resistivitiy was found to be 6. The prime aim of this work is to fabricate fluorine doped tin oxide thin film using a low cost manually controlled homemade spray pyrolysis system and investigate its structural, optical and electrical properties. Undoped, antimony doped and fluorine doped tin oxide films have been prepared by spray pyrolysis technique. The substrate temperature was set to 200 o c, 150 o c and 100 o c for different samples. Fluorine doped tin oxide fto coatings have been prepared using the midfrequency pulsed dc closed field unbalanced magnetron sputtering technique in an aro2 atmosphere using blends of tin oxide and tin fluoride powder formed into targets. Tin oxide thin films doped with fluorine, antimony and both have been prepared by spray pyrolysis from sncl precursor. The synthesis of fluorine doped tin oxide has been conducted under spray pyrolysis technique in which a precursor solution of sncl2. Films with the lowest electrical resistivity were deposited using an aqueous solution of zinc acetate at 490 c resulting in improved crystallinity, while. The fluorinedoped tin oxide thin films were prepared using a modified respiratory. Low temperature synthesis of fluorinedoped tin oxide. Hegazy et almodification of fluorinedoped tin oxide surface.
Tco glasses, fluorinedoped tin oxide fto has the biggest potential to be developed. Investigations on the optical properties of undoped. Different parameters like spray angle, source to substrate distance, spray nozzle position, spray rate, carrier gas. Optical properties of these films are investigated in the entire uv. Structural and optical properties of fluorine doped tin oxide thin. Ethanol sensing properties of f doped zno thin films by. The precursor solution was the mixture tin chloride pentahydrate solution and ammonium fluoride solution. The oxygen deficiency and dopant presence into films increase the electric conductivity of them. A systematic optimization of the solvent and the precursor as well as the preparation parameters and their effect on structural and physical electricaloptical characteristics are. These two solutions were mixed and finally get the fluorine doped with tin oxide.
In the present work, undoped sno2 and fluorinedoped tin oxide fto thin films were prepared by solgel process using a solution composed of sncl2, h2o, nh4f, and ethanol mixture. Optoelectronic properties of fluorine doped tin oxide. Fto coatings were deposited with a thickness of 400 nm on glass substrates. Preparation of fluorine doped tin oxide film by ultrasonic spray. Effects of fsn atomic ratios on structuralmorphological, compositional, electrical, optical, and nanomechanical properties of the fto thin films were. Our previous work on undoped spray deposited sno 2 films showed that precursor concentration is the most important process parameter controlling growth rate and structural properties, which.
Mohamed, fabrication of fluorine doped tin oxide fto thin films using spray pyrolysis deposition method for transparent conducting oxide, arpn journal of engineering and applied sciences jeas, vol. Fluorine doped tin oxide fto film is one of the most promising transparent conducting materials. Fluorinedoped tin oxide films by spray pyrolysis using vacuum within nozzle the water molecules provide oxygen, however the oxygen concentration is affected by the rate of cooling of the films after the spray due to the adsorption of oxygen. The refractive index,n, showed a considerable decrease 2. Optical constants such as refractive index n, extinction coefficient k and the absorption coefficient of the fto thin films were determined using spectrophotometric measurement of transmittance, absorbance and reflectance in the spectral range from 172 to 1100nm. Influence of atomizing voltage on fluorine doped tin oxide. Pdf structural and optical properties of fluorine doped tin oxide. Titanium dioxide, spray pyrolysis, doping mafiadoc. Sno 2 films were prepared by spray pyrolysis technique on glass substrates.
Effect of substrate temperature on fluorine doped tin. Transparent and conductive fluorine doped tin oxide thin films fto were deposited on to thoroughly cleaned glass substrates by nebulized spray pyrolysis technique using dihydrated tin ii. The solution then proceeds to spray pyrolysis process to produce the fto substrate. Improvement of transparent conducting performance on. Among the commercially common transparent conducting oxides tcos are fluorinedoped tin oxide fto and indiumdoped tin oxide ito, neither of which meets all criteria for the optimal tco. Fluorinedoped tin oxide fto films were prepared at different substrate temperatures by ultrasonic spray pyrolysis technique on glass substrates. Fluorine doped tin oxide fto is a possible alternative to ito because fto is inexpensive as well as chemically and thermally stable kim et al. They are an important component in a number of electronic devices including liquidcrystal displays, oleds, touchscreens and photovoltaics. Spray pyrolysis on fluorine doped tin oxide fto coated glass slides nitrogen as the carrier gas. The purpose of this research is aimed at finding an optimum. Dopants used were antimony tri chloride sbcl 3 for antimony doped tin oxide ato films, and ammonium fluoride nh 4 f for. Fluorine doping increased the degree of crystallinity and preferred orientation as well as the figure of merit 23.
Performance of transparent conducting fluorinedoped tin. The asprepared films are polycrystalline with a tetragonal crystal structure. Thin film deposition using spray pyrolysis 105 properties of zinc oxide. Nanomechanical and material properties of fluorinedoped tin.
Spray pyrolysis deposition spd technique has been employed to prepare large area fluorinedoped tin oxide fto, nanocrystalline tio. Structural, optical and electrical properties of fluorine. Developed spray pyrolysis reactor for fabricating fluorinedoped tin. The electrical properties of fto films prepared by sol gel remain relatively lower than the. Pdf optimization of fabricating fluorinedoped tin oxide. Fluorinedoped tin oxide fto thin films were prepared, at different substrate temperatures, using dilute precursor solutions of dinbutyltiniv diacetate 0. Physicochemical characteristics of fluorine doped tin. The technique of solgel combined with ultrasonic spray pyrolysis gives the possibility to produce highquality largescale fto films. Uvvisible spectroscopy, hall effect measurement, edx, sem and tofsims were employed to investigate the optoelectronic properties of the film.
Undoped and nitrogendoped titanium dioxide tio2 thin films of 400 nm thick deposited by spray pyrolysis were structurally and optically characterized. Motohiro, lowtemperature growth of highly crystallized transparent conductive fluorinedoped tin oxide films by intermittent spray pyrolysis deposition. Temperature dependence of fluorinedoped tin oxide films. While indium tin oxide ito is the most widely used, alternatives include widerspectrum transparent conductive oxides tcos, conductive. Structural and optical characterization of nitrogendoped. Electrical and optical properties of fluorine doped tin oxide. Here we report a part of our work on development of optoelectronic device quality fluorine doped tin dioxide sno 2. Syntheses and characterization of fluorine doped tin oxide.
The effect of doping on the concentration and mobility of the charge carriers electrons as well as the resistivity of the films has been studied. Nanomechanical and material properties of fluorinedoped. Fabrication of fluorine doped tin oxide fto thin filmsusing spray pyrolysis deposition methodfor transparent conducting oxide. Structural studies of the films were undertaken by xray diffraction xrd. Xrd studies reveal that the material deposited is polycrystalline sno2 and. Fluorodoped tin oxide was reported to behave as ntype semiconductor with wide band gap within 3. Optical and electrical properties of fluorine doped tin. Fluorine doped tin oxide fto thin films were prepared by chemical spray pyrolysis method on glass substrates for different substrate temperatures and their structural, optical and electrical studies were investigated. Transparent conducting films tcfs are thin films of optically transparent and electrically conductive material.
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